3" wafer with sensor dies

Individual coil for pressure sensor measuring ~2mm

The fabrication of micro electrical mechanical systems (MEMS) -micro devices and micro components for applications such as pressure or temperature sensors is a focus area for our center. This complex procedure involves a series of highly sophisticated processes including:

• deposition
• masking
• etching

Our interdisciplinary resources, structure and clean room facility at MSU, allow us to perfect this technology and integrate our expertise to real applications. For example producing a temperature sensor for cutting tools. In this way we are able to offer complete technology solutions to our customers.

A speciality of our center is to integrate CVD diamond into the MEMS program since its tremendous properties, in particular its hardness, chemical inertness, low coefficient of friction and corrosion resistance, make it a key material for MEMS technology.

Our partnership with MSU brings together the various functions necessary to manufacture MEMS. For more information click the link below www.egr.msu.edu.

Contact

Dr. Thomas Schuelke
Phone: 1-517- 432-8173